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[IEEE 2010 Academic Symposium on Optoelectronics Technology (ASOT) - Harbin, China (2010.07.28-2010.08.1)] 2010 Academic Symposium on Optoelectronics and Microelectronics Technology and 10th Chinese-Russian Symposium on Laser Physics and Laser TechnologyOptoelectronics Technology (ASOT) - Study on deposition of amorphous DLC films for CO2 laser by RF-PECVD
Tang, Ji-long, Liu, Guo-jun, Fu, Xiu-hua, Wang, JingYear:
2010
Language:
english
DOI:
10.1109/rcslplt.2010.5615381
File:
PDF, 943 KB
english, 2010