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Nitrogen-rich carbon nitride film formation by means of ion beam and vapor deposition method
Fujimoto, Fuminori, Ogata, KiyoshiVolume:
140
Language:
english
Journal:
Radiation Effects and Defects in Solids
DOI:
10.1080/10420159608212937
Date:
January, 1996
File:
PDF, 337 KB
english, 1996