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Adsorption mechanism and kinetics of chlorine on Si(100)-2×1: A theoretical study
Cao, Pei-Lin, Lee, Lie-QuanVolume:
50
Language:
english
Journal:
Physical Review B
DOI:
10.1103/PhysRevB.50.14624
Date:
November, 1994
File:
PDF, 180 KB
english, 1994