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Integrated high-voltage modulator for plasma immersion ion implantation with an RF plasma
Rogozin, A I, Astrelin, V T, Richter, E, M ller, WVolume:
12
Language:
english
Journal:
Plasma Sources Science and Technology
DOI:
10.1088/0963-0252/12/3/327
Date:
August, 2003
File:
PDF, 179 KB
english, 2003