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Microstructure and properties of ultrathin amorphous silicon nitride protective coating
B. K. Yen, R. L. White, R. J. Waltman, Q. Dai, D. C. Miller, A. J. Kellock, B. Marchon, P. H. Kasai, M. F. Toney, B. R. York, H. Deng, Q. Xiao, V. RamanYear:
2003
Language:
english
DOI:
10.1116/1.1615974
File:
PDF, 505 KB
english, 2003