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Liquid-Injection Atomic Layer Deposition of TiO[sub x] and Pb–Ti–O Films
Watanabe, Takayuki, Hoffmann-Eifert, Susanne, Hwang, Cheol Seong, Waser, RainerVolume:
153
Year:
2006
Language:
english
Journal:
Journal of The Electrochemical Society
DOI:
10.1149/1.2219709
File:
PDF, 248 KB
english, 2006