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Characterization of wafer bonded photodetectors fabricated using various annealing temperatures and ambients
B. F. Levine, A. R. Hawkins, S. Hiu, B. J. Tseng, J. P. Reilley, C. A. King, L. A. Gruezke, R. W. Johnson, D. R. Zolnowski, J. E. BowersYear:
1997
Language:
english
DOI:
10.1063/1.119950
File:
PDF, 338 KB
english, 1997