[IEEE 2008 3rd IEEE International Conference on Nano/Micro...

  • Main
  • [IEEE 2008 3rd IEEE International...

[IEEE 2008 3rd IEEE International Conference on Nano/Micro Engineered and Molecular Systems - Sanya, China (2008.01.6-2008.01.9)] 2008 3rd IEEE International Conference on Nano/Micro Engineered and Molecular Systems - Investigation on micromachining technology compatibility of PECVD SiO2/Si3N4 double-layer electrets

Jin Liu,, Zhiqiu Lv,, Jinwen Zhang,
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Year:
2008
Language:
english
DOI:
10.1109/nems.2008.4484323
File:
PDF, 114 KB
english, 2008
Conversion to is in progress
Conversion to is failed