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[IEEE 2008 3rd IEEE International Conference on Nano/Micro Engineered and Molecular Systems - Sanya, China (2008.01.6-2008.01.9)] 2008 3rd IEEE International Conference on Nano/Micro Engineered and Molecular Systems - Investigation on micromachining technology compatibility of PECVD SiO2/Si3N4 double-layer electrets
Jin Liu,, Zhiqiu Lv,, Jinwen Zhang,Year:
2008
Language:
english
DOI:
10.1109/nems.2008.4484323
File:
PDF, 114 KB
english, 2008