Ion implantation into gallium arsenide

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Ion implantation into gallium arsenide

R. Anholt, P. Balasingam, S. Y. Chou, T. W. Sigmon, M. Deal
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Year:
1988
Language:
english
DOI:
10.1063/1.341475
File:
PDF, 1.37 MB
english, 1988
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