Surface modified silica mesoporous films as a low...

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Surface modified silica mesoporous films as a low dielectric constant intermetal dielectric

S. Yu, T. K. S. Wong, K. Pita, X. Hu, V. Ligatchev
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Year:
2002
Language:
english
DOI:
10.1063/1.1499979
File:
PDF, 481 KB
english, 2002
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