[IEEE IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop - Munich, Germany (31 March-1 April 2003)] Advanced Semiconductor Manufacturing Conference and Workshop, 2003 IEEEI/SEMI - Impact of additional LDD rapid thermal annealing on submicron n-MOSFETs
Qian Wensheng,, Leong, V.K.W., Wang Yuwen,, Li Yisuo,, Pandey Shesh Mani,, Manju, S., Benistant, F., Chu, S.Year:
2003
Language:
english
DOI:
10.1109/asmc.2003.1194498
File:
PDF, 206 KB
english, 2003