Radical and film growth kinetics in methane radio-frequency...

Radical and film growth kinetics in methane radio-frequency glow discharges

Dagel, D. J., Mallouris, C. M., Doyle, J. R.
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Volume:
79
Year:
1996
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.362500
File:
PDF, 511 KB
english, 1996
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