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Interfacial reaction and electrical properties in Ni/Si and Ni/SiGe(C) contacts
Shigeaki Zaima, Osamu Nakatsuka, Akira Sakai, Junichi Murota, Yukio YasudaVolume:
224
Year:
2004
Language:
english
Pages:
7
DOI:
10.1016/j.apsusc.2003.08.049
File:
PDF, 317 KB
english, 2004