Silicalite-1/polymer films with low-k dielectric constants

Applied Surface Science 2004 Vol. 226; Iss. 1-3

Silicalite-1/polymer films with low-k dielectric constants

O. Larlus, S. Mintova, V. Valtchev, B. Jean, T.H. Metzger, T. Bein
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Volume:
226
Year:
2004
Language:
english
Pages:
6
DOI:
10.1016/j.apsusc.2003.11.062
File:
PDF, 252 KB
english, 2004
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