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[IEEE 2007 International Conference on Microelectronics - ICM - Cairo, Egypt (2007.12.29-2007.12.31)] 2007 Internatonal Conference on Microelectronics - CMOS compatible edge coupled capacitive MEMS switch for RF applications
Shumin Zhang,, Wansheng Su,, Zaghloul, Mona E.Year:
2007
Language:
english
DOI:
10.1109/icm.2007.4497691
File:
PDF, 2.04 MB
english, 2007