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Annealing effects on zirconium nitride films
H.B Bhuvaneswari, V Rajagopal Reddy, R Chandramani, G Mohan RaoVolume:
230
Year:
2004
Language:
english
Pages:
6
DOI:
10.1016/j.apsusc.2004.02.055
File:
PDF, 162 KB
english, 2004