Laser processing of silicon at submicron scale using...

Laser processing of silicon at submicron scale using photochromic films

Qiying Chen, Suwas Nikumb
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Volume:
230
Year:
2004
Language:
english
Pages:
7
DOI:
10.1016/j.apsusc.2004.03.004
File:
PDF, 214 KB
english, 2004
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