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Investigation of the PECVD TiO2–Si(1 0 0) interface
Patrick R McCurdy, Laura J Sturgess, Sandeep Kohli, Ellen R FisherVolume:
233
Year:
2004
Language:
english
Pages:
11
DOI:
10.1016/j.apsusc.2004.03.009
File:
PDF, 330 KB
english, 2004