Backside and frontside depth profiling of B delta doping,...

Applied Surface Science 2004 Vol. 231-232; Iss. none

Backside and frontside depth profiling of B delta doping, at low energy, using new and previous magnetic SIMS instruments

F. Laugier, J.M. Hartmann, H. Moriceau, P. Holliger, R. Truche, J.C. Dupuy
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Volume:
231-232
Year:
2004
Language:
english
Pages:
5
DOI:
10.1016/j.apsusc.2004.03.143
File:
PDF, 119 KB
english, 2004
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