Role of ion mass on damage accumulation during ion implantation in Ge
Napolitani, E., Bruno, E., Bisognin, G., Mastromatteo, M., De Salvador, D., Scapellato, G. G., Boninelli, S., Priolo, F., Privitera, V., Carnera, A.Volume:
211
Language:
english
Journal:
physica status solidi (a)
DOI:
10.1002/pssa.201300324
Date:
January, 2014
File:
PDF, 349 KB
english, 2014