Interfacial microstructure and electrical properties of...

Interfacial microstructure and electrical properties of PT/Al2O3/Si annealed at high temperatures

San-Yuan Chen, Chi-Sheng Hsiao, Jung-Jui Hsu
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Volume:
238
Year:
2004
Language:
english
Pages:
4
DOI:
10.1016/j.apsusc.2004.05.166
File:
PDF, 184 KB
english, 2004
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