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Structure and interface properties of Mo/B4C/Si multilayers deposited by rf-magnetron sputtering
A. Patelli, J. Ravagnan, V. Rigato, G. Salmaso, D. Silvestrini, E. Bontempi, L.E. DeperoVolume:
238
Year:
2004
Language:
english
Pages:
7
DOI:
10.1016/j.apsusc.2004.05.176
File:
PDF, 254 KB
english, 2004