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Topography induced by sputtering in a magnetic sector instrument: an AFM and SEM study
E. Iacob, M. Bersani, A. Lui, D. Giubertoni, M. Barozzi, M. AnderleVolume:
238
Year:
2004
Language:
english
Pages:
5
DOI:
10.1016/j.apsusc.2004.05.184
File:
PDF, 300 KB
english, 2004