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Silicon dissolution regimes from chemical vapour etching: from porous structures to silicon grooving
A.Ben Jaballah, M. Saadoun, M. Hajji, H. Ezzaouia, B. Bessaı̈sVolume:
238
Year:
2004
Language:
english
Pages:
5
DOI:
10.1016/j.apsusc.2004.05.210
File:
PDF, 197 KB
english, 2004