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Ion-induced oxidation of aluminum during reactive magnetron sputtering
Kreiter, Oliver, Grosse-Kreul, Simon, Corbella, Carles, von Keudell, AchimVolume:
113
Year:
2013
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.4799052
File:
PDF, 723 KB
english, 2013