Growth and characterization of MOMBE grown HfO2

Growth and characterization of MOMBE grown HfO2

Tae-Hyoung Moon, Moon-Ho Ham, Myoung-Seok Kim, Ilgu Yun, Jae-Min Myoung
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Volume:
240
Year:
2005
Language:
english
Pages:
7
DOI:
10.1016/j.apsusc.2004.06.017
File:
PDF, 267 KB
english, 2005
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