Influence of C incorporation on the initial growth of...

Influence of C incorporation on the initial growth of epitaxial NiSi2 on Si(1 0 0)

Emi Okada, Osamu Nakatsuka, Satoshi Oida, Akira Sakai, Shigeaki Zaima, Yukio Yasuda
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Volume:
237
Year:
2004
Language:
english
Pages:
6
DOI:
10.1016/j.apsusc.2004.06.034
File:
PDF, 286 KB
english, 2004
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