Evolution of surface morphology of Si-trench sidewalls...

Applied Surface Science 2004 Vol. 237; Iss. 1-4

Evolution of surface morphology of Si-trench sidewalls during hydrogen annealing

R. Hiruta, H. Kuribayashi, S. Shimizu, K. Sudoh, H. Iwasaki
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Volume:
237
Year:
2004
Language:
english
Pages:
5
DOI:
10.1016/j.apsusc.2004.06.056
File:
PDF, 355 KB
english, 2004
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