Etching of polycrystalline copper by oblique injection of...

Applied Surface Science 2004 Vol. 237; Iss. 1-4

Etching of polycrystalline copper by oblique injection of argon ion

Takashi Taguchi, Yuji Yamauchi, Yuko Hirohata, Tomoaki Hino, Masana Nishikawa
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Volume:
237
Year:
2004
Language:
english
Pages:
5
DOI:
10.1016/j.apsusc.2004.06.159
File:
PDF, 230 KB
english, 2004
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