Effect of pre-treatment and nickel layer thickness on nickel silicide/silicon carbide contact
Yu Cao, Lars Nyborg, Urban Jelvestam, Danqing YiVolume:
241
Year:
2005
Language:
english
Pages:
11
DOI:
10.1016/j.apsusc.2004.07.052
File:
PDF, 352 KB
english, 2005