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Auger electron spectroscopy analysis of high metal content micro-structures grown by electron beam induced deposition
F. Cicoira, P. Hoffmann, C.O.A. Olsson, N. Xanthopoulos, H.J. Mathieu, P. DoppeltVolume:
242
Year:
2005
Language:
english
Pages:
7
DOI:
10.1016/j.apsusc.2004.08.005
File:
PDF, 279 KB
english, 2005