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Annealing effects on electron-beam evaporated Al2O3 films
Shang Shuzhen, Chen Lei, Hou Haihong, Yi Kui, Fan Zhengxiu, Shao JiandaVolume:
242
Year:
2005
Language:
english
Pages:
6
DOI:
10.1016/j.apsusc.2004.09.047
File:
PDF, 172 KB
english, 2005