![](/img/cover-not-exists.png)
Conformality of remote plasma-enhanced atomic layer deposition processes: An experimental study
M. Kariniemi, J. Niinistö, M. Vehkamäki, M. Kemell, M. Ritala, M. Leskelä, M. PutkonenYear:
2012
Language:
english
DOI:
10.1116/1.3659699
File:
PDF, 1.45 MB
english, 2012