Formation of wide and narrow optical-band-gap amorphous-CNx:H films using i-C4H10/N2 supermagnetron plasma
Haruhisa Kinoshita, Ryo Ikuta, Katsutoshi SakuraiVolume:
244
Year:
2005
Language:
english
Pages:
4
DOI:
10.1016/j.apsusc.2004.10.083
File:
PDF, 209 KB
english, 2005