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Atomic layer deposition in porous structures: 3D photonic crystals
J.S. King, D. Heineman, E. Graugnard, C.J. SummersVolume:
244
Year:
2005
Language:
english
Pages:
6
DOI:
10.1016/j.apsusc.2004.10.110
File:
PDF, 255 KB
english, 2005