[IEEE 2006 IEEE International Reliability Physics Symposium Proceedings - San Jose, CA, USA (2006.03.26-2006.03.30)] 2006 IEEE International Reliability Physics Symposium Proceedings - Effect of Chemical Mechanical Polish Process on Low-Temperature Poly-Sige Thin-Film Transistors
Shieh, Ming-shan, Chen, Chih-yang, Hsu, Yuan-jiun, Wang, Shen-de, Lei, Tan-fuYear:
2006
Language:
english
DOI:
10.1109/relphy.2006.251337
File:
PDF, 280 KB
english, 2006