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[IEEE 2006 IEEE International Reliability Physics Symposium Proceedings - San Jose, CA, USA (2006.03.26-2006.03.30)] 2006 IEEE International Reliability Physics Symposium Proceedings - Effect of Chemical Mechanical Polish Process on Low-Temperature Poly-Sige Thin-Film Transistors

Shieh, Ming-shan, Chen, Chih-yang, Hsu, Yuan-jiun, Wang, Shen-de, Lei, Tan-fu
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Year:
2006
Language:
english
DOI:
10.1109/relphy.2006.251337
File:
PDF, 280 KB
english, 2006
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