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Crystallization of hydrogenated amorphous silicon–carbon films by means of laser treatments
G. Ambrosone, U. Coscia, S. Lettieri, P. Maddalena, C. Minarini, V. Parisi, S. SchutzmannVolume:
247
Year:
2005
Language:
english
Pages:
6
DOI:
10.1016/j.apsusc.2005.01.051
File:
PDF, 271 KB
english, 2005