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RF plasma reactive pulsed laser deposition of boron nitride thin films
B. Mitu, P. Bilkova, V. Marotta, S. Orlando, A. SantagataVolume:
247
Year:
2005
Language:
english
Pages:
5
DOI:
10.1016/j.apsusc.2005.01.085
File:
PDF, 208 KB
english, 2005