Laser doping for microelectronics and microtechnology

Applied Surface Science 2005 Vol. 247; Iss. 1-4

Laser doping for microelectronics and microtechnology

Thierry Sarnet, Gurwan Kerrien, Nourdin Yaakoubi, Alain Bosseboeuf, Elisabeth Dufour-Gergam, Dominique Débarre, Jacques Boulmer, Kuniyuki Kakushima, Cyrille Laviron, Miguel Hernandez, Julien Venturini
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Volume:
247
Year:
2005
Language:
english
Pages:
8
DOI:
10.1016/j.apsusc.2005.01.172
File:
PDF, 646 KB
english, 2005
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