Surface morphology of anisotropically etched single-crystal...

Journal of Micromechanics and Microengineering 2000 / 12 Vol. 10; Iss. 4

Surface morphology of anisotropically etched single-crystal silicon

Shikida, Mitsuhiro, Tokoro, Kenji, Uchikawa, Daisuke, Sato, Kazuo
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Volume:
10
Language:
english
Journal:
Journal of Micromechanics and Microengineering
DOI:
10.1088/0960-1317/10/4/306
Date:
December, 2000
File:
PDF, 497 KB
english, 2000
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