Characteristics of sandwich-structured Al2O3/HfO2/Al2O3...

Applied Surface Science 2005 Vol. 252; Iss. 5

Characteristics of sandwich-structured Al2O3/HfO2/Al2O3 gate dielectric films on ultra-thin silicon-on-insulator substrates

Xinhong Cheng, Zhaorui Song, Jun Jiang, Yuehui Yu
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Volume:
252
Year:
2005
Language:
english
Pages:
7
DOI:
10.1016/j.apsusc.2005.03.144
File:
PDF, 381 KB
english, 2005
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