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[IEEE 2007 2nd IEEE International Conference on Nano/Micro Engineered and Molecular Systems - Bangkok, Thailand (2007.01.16-2007.01.19)] 2007 2nd IEEE International Conference on Nano/Micro Engineered and Molecular Systems - A Bulk Micromachined Si-on-glass Tunneling Accelerometer with Out-of-plane Sensing Capability
Miao, Min, Hu, Qifang, Hao, Yilong, Dong, Haifeng, Wang, Ling, Shi, Yunbo, Shen, SanminYear:
2007
Language:
english
DOI:
10.1109/nems.2007.352270
File:
PDF, 6.21 MB
english, 2007