Properties of W–Ge–N as a diffusion barrier material for Cu

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Properties of W–Ge–N as a diffusion barrier material for Cu

S. Rawal, D. P. Norton, T. J. Anderson, L. Mcelwee-white
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Year:
2005
Language:
english
DOI:
10.1063/1.2042534
File:
PDF, 358 KB
english, 2005
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