Preparation of fluorocarbon thin film deposited by soft...

Applied Surface Science 2006 Vol. 252; Iss. 22

Preparation of fluorocarbon thin film deposited by soft X-ray ablation and its electrical characteristics and thermal stability

Takeshi Kanashima, Osamu Maida, Norihiro Kohma, Masaki Okumoto, Masato Ueno, Satoshi Kitai, Masanori Okuyama, Haruhiko Ohashi, Yusuke Tamenori
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
252
Year:
2006
Language:
english
Pages:
7
DOI:
10.1016/j.apsusc.2005.06.055
File:
PDF, 669 KB
english, 2006
Conversion to is in progress
Conversion to is failed