Toward Fast Calibration of Global Drift in Scanning...

Toward Fast Calibration of Global Drift in Scanning Electron Microscopes with Respect to Time and Magnification

Malti, Abed C., Dembélé, Sounkalo, Piat, Nadine, Arnoult, Claire, Marturi, Naresh
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Volume:
6
Language:
english
Journal:
International Journal of Optomechatronics
DOI:
10.1080/15599612.2012.663462
Date:
January, 2012
File:
PDF, 1.82 MB
english, 2012
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