![](/img/cover-not-exists.png)
Silicon surface morphology study after exposure to tailored femtosecond pulses
V. Hommes, M. Miclea, R. HergenröderVolume:
252
Year:
2006
Language:
english
Pages:
12
DOI:
10.1016/j.apsusc.2005.08.089
File:
PDF, 846 KB
english, 2006