Synergetic effect between ion energy and sample temperature in the formation of distinct dot pattern on Si(1 1 0) by ion-sputter erosion
Wei-Qing Li, Le-Jun Qi, Xinju Yang, Li Ling, Wen-Bin Fan, You-Yuan Zhao, Ming LuVolume:
252
Year:
2006
Language:
english
Pages:
7
DOI:
10.1016/j.apsusc.2005.09.019
File:
PDF, 363 KB
english, 2006