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Structural and optical properties of amorphous hydrogenated silicon carbonitride films produced by PECVD
E. Vassallo, A. Cremona, F. Ghezzi, F. Dellera, L. Laguardia, G. Ambrosone, U. CosciaVolume:
252
Year:
2006
Language:
english
Pages:
8
DOI:
10.1016/j.apsusc.2005.10.017
File:
PDF, 419 KB
english, 2006