Surface free energy of CrNx films deposited using closed...

Applied Surface Science 2006 Vol. 252; Iss. 23

Surface free energy of CrNx films deposited using closed field unbalanced magnetron sputtering

Chen-Cheng Sun, Shih-Chin Lee, Shyue-Bin Dai, Yaw-Shyan Fu, Yau-Chyr Wang, Yu-Hwe Lee
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Volume:
252
Year:
2006
Language:
english
Pages:
6
DOI:
10.1016/j.apsusc.2005.10.055
File:
PDF, 301 KB
english, 2006
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