Effects of Si doping on the structural and electrical...

Applied Surface Science 2006 Vol. 252; Iss. 24

Effects of Si doping on the structural and electrical properties of Ge2Sb2Te5 films for phase change random access memory

Baowei Qiao, Jie Feng, Yunfeng Lai, Yun Ling, Yinyin Lin, Ting’ao Tang, Bingchu Cai, Bomy Chen
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Volume:
252
Year:
2006
Language:
english
Pages:
6
DOI:
10.1016/j.apsusc.2005.11.047
File:
PDF, 225 KB
english, 2006
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